Device Details
Mask Writer
Main Purpose :
The Heidelberg DWL 66fs is a high resolution pattern generator for mask making and direct writing.
The DWL 66 FS can be configured with two additional write mode types: Gray Scale Exposure Mode and Vector Exposure Mode.
The DWL 66 FS System offers two different principal aligment functions: Global Aligment and Field Aligment.
The system has two write heads which are 4mm and 2 mm .

Device Category: Class 100

Device Location : ITUnano Cleanroom