Device Details
Mask Aligner
Main Purpose :
The Suss MA6 is a top and bottom side contact printer used for fine lithography down to 1 micron or better. The MA6 is ideal for use with I-line (365 nm) resists.
The Suss MA6 has five possible lithography modes:
Soft Contact, Hard Contact,Vacuum Contact, Low Vacuum Contact ,Proximity

Device Category: Class 100

Device Location : ITUnano Cleanroom