Function and Features

• Suitable for examining metallic structures, composites, glass, ceramics, polymers, liquid crystals, semiconductor-based MEMs, wafers, and photovoltaic samples.
• Polarization capability
• Motorized, encoded, and manual body
• Color TFT touch screen for controlling all motorized functions of the microscope.
• Trinocular head with various camera attachment options
• 12V 100W halogen or LED illumination

Function and Features

• Capable of performing mask alignment studies with 5 different lithography modes.
  • Soft contact
  • Hard contact
  • Vacuum contact
  • Low vacuum contact
• 12V 100W halogen or LED illumination.
• Proximity

Function and Features

• Capable of mask writing with 4mm and 2mm writing heads at 0.75 micron resolution.
• Gray Scale Exposure Mod
• Hard contact
• Gray Scale Exposure Mod
• Vektör Exposure Mod
• Global Alignment
• Field Alignment

Function and Features

• Zoom microscope with a range of 20:1
• High magnification up to 345x (with a 10x lens)
• Maximum resolution of 1000LP/mm (with PlanApo S 2.3x objective)
• 3D effect up to the highest magnification

Function and Features

• Integrated hot plate and spin coating device on wet benches.
• Ability to use argon, nitrogen gases, and dry air guns.
• Can be used with DI water, tap water, and guns.
• Each wet bench has 6 power outlets for electronic devices.
• Control panel for monitoring waste tank and ensuring controlled working environment.

Function and Features

• Capable of resist coating at 10.000 rpm with 999 steps.

Function and Features

• Capable of surface topography imaging using tapping scan mode
• Provides high-resolution imaging of various surfaces
• Manual laser focusing for using cantilevers of any length.
• Ambient AFM with adjustable brightness LED for better optical imaging.
• Various imaging modes including Topography, Phase, Surface Magnetic Force, and Surface Electrostatic Force Imaging

İşlev ve Özellikleri

Sputtering method

• DC (conductive materials)
• RF (insulating materials)

Thermal Evaporation method

• Equipped with 3 different thermal evaporation sources
• Coating can be done from nanometer to several micrometer scale

Function and Features

• Equipped with lasers with 7 different wavelengths from UV to NIR (325nm, 442nm, 448 nm, 457nm, 514nm, 532nm, 785nm).
• Measurements can be taken from samples in liquid and moisture environments within the temperature range from 196°C to +600°C.
• Available at ITUnano Nanotechnology Research Center Cleanroom Laboratory.

Measurement Techniques:

• Depth Profile
• Mapping
• Single point measurement

Function and Features

• Sputtering
• DC
• RF
• E-beam evaporation
• Coating can be done quickly with high vacuum speed.
• Efficient coating can be achieved with three sputtering and four e-beam sources in a single vacuum chamber.

Function and Features

• Can cater to a wide range of samples.
• Results can be obtained at low voltages without losing resolution.
• Possesses a wide sample spectrum with different detector types.
• Characterization of insulating samples can be done with high performance in low vacuum mode.
• Large sample analyses can be easily performed thanks to the motorized holder.

Function and Features

• Surface roughness analysis of small areas or profiles is possible.
• Thickness of each layer in transparent multilayer thin film coatings can be measured separately.
• Topographic measurements with lateral resolution of 0.1 um and height resolution of 0.02 um can be achieved.

Function and Features

• Brag Brentano, scanning with parallel beam.
• Reciprocal Space Mapping.
• SAXS (Calculating nanoparticle size in liquid samples ranging from 100 nm to 200 nm).
• Analysis of Thin Film Thickness, Density, and Roughness (Reflectivity).
• Phase and Structure Analysis (Thin films, polymers, and powder samples).
• Stress Measurement (Calculation of compression-tension values). The Young’s modulus (MPa) value of the desired sample must be known.
• Texture Measurement.

Function and Features

• The main focus is on material properties, aiming to avoid contributions from electrode effects. Intrinsic electric material properties such as the complex permittivity ε*(ω) or conductivity σ*(ω) spectra can be easily evaluated from Z*(ω) with the assistance of sample dimensions. The magnetic permeability spectra μ*(ω) can be determined by replacing the sample electrodes with an inductive coil filled with sample material.
• In addition to frequency, electrical material properties depend on additional parameters, with temperature being the most important one. Time, DC bias (superimposed static electrical field), AC field strength, and pressure dependence are also frequently determined.

Function and Features

• Equipped with a Magnex-type superconducting magnet cooled by liquid helium and liquid nitrogen, operating at 11.74 Tesla power, and featuring a probe with 2 RF channels where 1H, 19F, 13C, 31P nuclei can be directly observed without any modification. It allows operation within the temperature range of -80°C to +130°C.

Measurement list includes

• 1H (proton)spektrum,
• 1H (spin decoupling) spektrum,
• Deuterium exchange spektrum,
• 13C (decoupled)spektrum,
• 13C (coupled)spektrum,
• Quantitative 13C spektrum,
• COSY-2D spektrum,
• NOESY-2D spektrum,
• HETCOR-2D spektrum,
• APT spektrum,
• DEPT spektrum,
• VT(Dynamic)NMR,
• 1D TOCSY-2D spektrum,
• HMBC-2D spektrum,
• HSQC-2D spektrum,
• HMQC-2D spektrum,
• ROESY-2D spektrum,
• 1D NOE spektrum-2D spektrum,
• 31P spektrum,
• 19F spektrum,
• 11B spektrum,
• 29Si spektrum