Function and Features

Class: Class 100
Brand / Model: Carl Zeiss Axio Imager.A2m

• Suitable for examining metallic structures, composites, glass, ceramics, polymers, liquid crystals, semiconductor-based MEMs, wafers, and photovoltaic samples.
• Polarization capability
• Motorized, encoded, and manual body
• Color TFT touch screen for controlling all motorized functions of the microscope.
• Trinocular head with various camera attachment options
• 12V 100W halogen or LED illumination

Function and Features

Class: Class 100
Brand / Model: SÜSS MicroTec MA6/BA6

• Capable of performing mask alignment studies with 5 different lithography modes.
  • Soft contact
  • Hard contact
  • Vacuum contact
  • Low vacuum contact
• 12V 100W halogen or LED illumination.
• Proximity

Function and Features

Class: Class 100
Brand / Model: Heidelberg Instruments DWL 66FS

• Capable of mask writing with 4mm and 2mm writing heads at 0.75 micron resolution.
• Gray Scale Exposure Mod
• Hard contact
• Gray Scale Exposure Mod
• Vektör Exposure Mod
• Global Alignment
• Field Alignment

Function and Features

Class: Class 100
Brand / Model: Carl Zeiss SteREO Discovery.V20

• Zoom microscope with a range of 20:1
• High magnification up to 345x (with a 10x lens)
• Maximum resolution of 1000LP/mm (with PlanApo S 2.3x objective)
• 3D effect up to the highest magnification

Function and Features

Class: Class 100 and Class 1000
Brand / Model: Dorutek

• Integrated hot plate and spin coating device on wet benches.
• Ability to use argon, nitrogen gases, and dry air guns.
• Can be used with DI water, tap water, and guns.
• Each wet bench has 6 power outlets for electronic devices.
• Control panel for monitoring waste tank and ensuring controlled working environment.

Function and Features

Class: Class 100 and Class 1000
Brand / Model: Laurell Technologies WS-650MZ-23NPPB

• Capable of resist coating at 10.000 rpm with 999 steps.

Function and Features

Class: Class 1000
Brand / Model: NanoMagnetics Instruments ezAFM

• Capable of surface topography imaging using tapping scan mode
• Provides high-resolution imaging of various surfaces
• Manual laser focusing for using cantilevers of any length.
• Ambient AFM with adjustable brightness LED for better optical imaging.
• Various imaging modes including Topography, Phase, Surface Magnetic Force, and Surface Electrostatic Force Imaging

Function and Features

Class: Class 1000
Brand / Model: VAKSİS MIDAS PVD-MT/2M_3T_1ICP

Sputtering method

• DC (conductive materials)
• RF (insulating materials)

Thermal Evaporation method

• Equipped with 3 different thermal evaporation sources
• Coating can be done from nanometer to several micrometer scale

Function and Features

Class: Class 1000
Brand / Model: Renishaw inVia

• Equipped with lasers with 7 different wavelengths from UV to NIR (325nm, 442nm, 448 nm, 457nm, 514nm, 532nm, 785nm).
• Measurements can be taken from samples in liquid and moisture environments within the temperature range from 196°C to +600°C.
• Available at ITUnano Nanotechnology Research Center Cleanroom Laboratory.

Measurement Techniques:

• Depth Profile
• Mapping
• Single point measurement

Function and Features

Class: Class 1000
Brand / Model: Kurt J. Lesker AXXIS (nanoPVD)

• Sputtering
• DC
• RF
• E-beam evaporation
• Coating can be done quickly with high vacuum speed.
• Efficient coating can be achieved with three sputtering and four e-beam sources in a single vacuum chamber.

Function and Features

Class: Class 1000
Brand / Model: FEI Nova NanoSEM 450

• Can cater to a wide range of samples.
• Results can be obtained at low voltages without losing resolution.
• Possesses a wide sample spectrum with different detector types.
• Characterization of insulating samples can be done with high performance in low vacuum mode.
• Large sample analyses can be easily performed thanks to the motorized holder.

Function and Features

Class: Class 1000
Brand / Model: Carl Zeiss Axio CSM 700

• Surface roughness analysis of small areas or profiles is possible.
• Thickness of each layer in transparent multilayer thin film coatings can be measured separately.
• Topographic measurements with lateral resolution of 0.1 um and height resolution of 0.02 um can be achieved.

Function and Features

Class: Class 1000
Brand / Model: Rigaku SmartLab 9 kW

• Brag Brentano, scanning with parallel beam.
• Reciprocal Space Mapping.
• SAXS (Calculating nanoparticle size in liquid samples ranging from 100 nm to 200 nm).
• Analysis of Thin Film Thickness, Density, and Roughness (Reflectivity).
• Phase and Structure Analysis (Thin films, polymers, and powder samples).
• Stress Measurement (Calculation of compression-tension values). The Young’s modulus (MPa) value of the desired sample must be known.
• Texture Measurement.