ITUnano – Nanotechnology Application and Research Center is a leading regional research center in nanotechnology and nanoscience, conducting interdisciplinary studies with a focus on “Functional Nanomaterials.” The center supports a broad range of R&D activities spanning engineering and fundamental sciences, while developing innovative solutions through collaborations with academia and industry.

Cleanroom Infrastructure

ITUnano provides advanced micro- and nanofabrication infrastructure with internationally standardized Class 100 and Class 1000 cleanrooms. These areas are equipped with specialized environmental control systems that precisely regulate parameters such as particle concentration, temperature, humidity and pressure balance.

Class 100 (ISO 5) Areas

• Dedicated to nanofabrication and photolithography processes.
• Air cleanliness is maintained at a maximum of 100 particles (<0.5 µm) per cubic meter.
• HEPA- and ULPA-filtered laminar-flow systems provide dust-free production conditions.
• Temperature is maintained at ±0.5 °C and relative humidity at 40–50%.
• Positive pressure prevents particle ingress from the surrounding environment.

Class 1000 (ISO 6) Areas

• Used for thin-film coating, plasma etching, spin coating, mask alignment and general preparation processes.
• Limited to a maximum of 1,000 particles (<0.5 µm) per cubic meter.
• Acid-compatible wet benches, local exhaust systems, antistatic flooring, and gas and chemical safety systems are available for chemical processes.

Research Focus and Collaborations

ITUnano conducts pioneering nanotechnology- and nanoscience-based projects in areas including:

• Semiconductor devices and sensors,
• Optoelectronic and photonic structures,
• Thin-film materials and surface engineering,
• Energy storage and conversion systems.

The center is open to high-quality national and international R&D collaborations and aims to develop next-generation technologies through partnerships with industry, public institutions and academia.